EECS 425 - Integ Microsys Lab
Section: 001
Term: WN 2009
Subject: Electrical Engineering and Computer Science (EECS)
Department: CoE Electrical Engineering and Computer Science
4 (Non-LSA credit).
Requirements & Distribution:
Enforced Prerequisites:
(EECS311or312or 414) C> or Gr
Advisory Prerequisites:
EECS 311 or EECS 312 or EECS 414 or graduate standing.
Other Course Info:
This course counts toward the 60 credits of math/science required for a Bachelor of Science degree.
May not be repeated for credit.
Primary Instructor:

Development of a complete integrated microsystem, from functional definition to final test. MEMS-based transducer design and electrical, mechanical and thermal limits. Design of MOS interface circuits. MEMS and MOS chip fabrication. Mask making, pattern transfer, oxidation, ion implantation and metallization. Packaging and testing challenges. Students work in interdisciplinary teams.

EECS 425 - Integ Microsys Lab
Schedule Listing
001 (LEC)
TuTh 10:30AM - 12:00PM
011 (LAB)
Tu 1:00PM - 5:00PM
012 (LAB)
Th 1:00PM - 5:00PM
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