EECS 414 - Intro to MEMS
Section: 881
Term: FA 2010
Subject: Electrical Engineering and Computer Science (EECS)
Department: CoE Electrical Engineering and Computer Science
Credits:
4 (Non-LSA credit).
Requirements & Distribution:
BS
Enforced Prerequisites:
[MA215&216&PHYS240) C> or Gr
Other Course Info:
(non-LSA).
BS:
This course counts toward the 60 credits of math/science required for a Bachelor of Science degree.
Repeatability:
May not be repeated for credit.
Primary Instructor:

Micro electro mechanical systems (MEMS), devices, and technologies. Micro-machining and microfabrication techniques, including planar thin-film processing, silicon etching, wafer bonding, photolithography, deposition, and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive, and thermal sensors/actuators and applications. Computer-aided design for MEMS layout, fabrication, and analysis.

EECS 414 - Intro to MEMS
Schedule Listing
001 (LEC)
 
27287
Open
55
 
-
TuTh 1:30PM - 3:00PM
011 (DIS)
P
27289
Open
55
 
-
W 1:30PM - 2:30PM
881 (LEC)
P
27845
Closed
0
 
-
TuTh 1:30PM - 3:00PM
Note: "Section 881 in only for students in Integrated Microsystems Degree Program"
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