EECS 598 - Special Topics
Section: 001 RF MEMS
Term: FA 2011
Subject: Electrical Engineering and Computer Science (EECS)
Department: CoE Electrical Engineering and Computer Science
Requirements & Distribution:
Waitlist Capacity:
Advisory Prerequisites:
Permission of instructor or counselor.
Other Course Info:
F, W, Sp/Su, Sp, Su.
This course counts toward the 60 credits of math/science required for a Bachelor of Science degree.
May be repeated for credit.
Primary Instructor:

  • Introduction to RF and RF MEMS
  • Overview of MEMS processing, both silicon and non-silicon based
  • Design and high-frequency modeling of MEMS structures using HFSS
  • Electrostatic, piezoelectric and magnetic actuation for RF MEMS
  • Reconfigurable architectures- Technology trends
  • Semester-long team project on a topic related to course material

Micro-electromechanical devices and systems (MEMS) can greatly enhance the performance of RF integrated circuit as they can operate with much lower power in a smaller size compared to their integrated counterparts. This course covers the operation principle, design, fabrication, and technology trend of high-frequency micromechanical devices with focus on those most used for communication application. Devices and systems covered in this course include resonators, switches, filters, phase-shifters, tunable passives, and reconfigurable modules. The need for high-Q devices will be explained in detail and the physical phenomena that limit the performance and scaling of RF MEMS will be discussed. In addition, students will learn about accurate modeling of MEMS in electrical domain, transduction mechanism commonly used in MEMS, and design techniques used to achieve high performance (high power handling, high linearity, low-loss, etc).

Prerequisite: EECS 414 (introduction to MEMS), or permission of the instructor

Recommended Textbook: RF MEMS: Theory, Design and Technology, John Wiley & Sons, Inc., Gabriel M. Rebeiz

Grading: Homework 10%, Midterm Exam 20%, Design Project 40%, Final Exam: 30%

EECS 598 - Special Topics
Schedule Listing
001 (LEC)
TuTh 3:00PM - 5:00PM
Note: "4 Credit Hours for Sec 001", Prerequisites for Lec 001: EECS 414 or permission of the instructor
002 (LEC)
MW 1:30PM - 3:00PM
Note: "3 Credit Hours for Sec 002" Prerequisites for Lec 002: EECS 427 or permission of instructor
003 (LEC)
TuTh 10:30AM - 12:00PM
Note: "4 Credit Hours for Sec 003", Prerequisites for Lec 003: (EECS 370 or EECS 373) and EECS 280, or equivalent or permission of Instructor.
004 (LEC)
TuTh 3:00PM - 4:30PM
Note: "3 Credit Hours for Sec 004", Prerequisites for Lec 004: EECS281/STATS412 (or equivalent with permission of instructor)
031 (LAB)
Note: STUDENTS ARE AUTO-ENROLLED IN LECTURE 003 WHEN THEY ELECT A LABORATORY 031. "Lab times to be determined during the semester for Sec 031"
NOTE: Data maintained by department in Wolverine Access. If no textbooks are listed below, check with the department.

ISBN: 9780471201694
RF MEMS : theory, design, and technology, Author: Rebeiz, Gabriel M., Publisher: J. Wiley 2003
Other Textbook Editions OK.
Syllabi are available to current LSA students. IMPORTANT: These syllabi are provided to give students a general idea about the courses, as offered by LSA departments and programs in prior academic terms. The syllabi do not necessarily reflect the assignments, sequence of course materials, and/or course expectations that the faculty and departments/programs have for these same courses in the current and/or future terms.

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