LSA Course Guide

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Class Detail:
FA 2011 Electrical Engineering and Computer Science EECS 598 - Special Topics Section 001 RF MEMS
Credits:	4
Requirements & Distribution:	BS
Waitlist Capacity:	unlimited
Advisory Prerequisites:	Permission of instructor or counselor.
Other Course Info:	F, W, Sp/Su, Sp, Su.
BS:	This course counts toward the 60 credits of math/science required for a Bachelor of Science degree.
Repeatability:	May be repeated for credit.
Primary Instructor:	Raieszadeh,Mina
	(real time availability for all sections)

Introduction to RF and RF MEMS Overview of MEMS processing, both silicon and non-silicon based Design and high-frequency modeling of MEMS structures using HFSS Electrostatic, piezoelectric and magnetic actuation for RF MEMS Reconfigurable architectures- Technology trends Semester-long team project on a topic related to course material Micro-electromechanical devices and systems (MEMS) can greatly enhance the performance of RF integrated circuit as they can operate with much lower power in a smaller size compared to their integrated counterparts. This course covers the operation principle, design, fabrication, and technology trend of high-frequency micromechanical devices with focus on those most used for communication application. Devices and systems covered in this course include resonators, switches, filters, phase-shifters, tunable passives, and reconfigurable modules. The need for high-Q devices will be explained in detail and the physical phenomena that limit the performance and scaling of RF MEMS will be discussed. In addition, students will learn about accurate modeling of MEMS in electrical domain, transduction mechanism commonly used in MEMS, and design techniques used to achieve high performance (high power handling, high linearity, low-loss, etc). Prerequisite: EECS 414 (introduction to MEMS), or permission of the instructor Recommended Textbook: RF MEMS: Theory, Design and Technology, John Wiley & Sons, Inc., Gabriel M. Rebeiz Grading: Homework 10%, Midterm Exam 20%, Design Project 40%, Final Exam: 30%

Course Syllabi Syllabi are available to current LSA students. IMPORTANT: These syllabi are provided to give students a general idea about the courses, as offered by LSA departments and programs in prior academic terms. The syllabi do not necessarily reflect the assignments, sequence of course materials, and/or course expectations that the faculty and departments/programs have for these same courses in the current and/or future terms. Search for Syllabus

Textbooks/Other Materials (data maintained by department in Wolverine Access)



ISBN: 9780471201694	RF MEMS : theory, design, and technology, Author: Rebeiz, Gabriel M., Publisher: J. Wiley 2003
Optional	Other Textbook Editions OK.