EECS 528 - M-Elec Proc Tech
Section: 001
Term: WN 2018
Subject: Electrical Engineering and Computer Science (EECS)
Department: CoE Electrical Engineering and Computer Science
Credits:
3 (Non-LSA credit).
Requirements & Distribution:
BS
Waitlist Capacity:
unlimited
Advisory Prerequisites:
EECS 421,423.
BS:
This course counts toward the 60 credits of math/science required for a Bachelor of Science degree.
Repeatability:
May not be repeated for credit.
Primary Instructor:

Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include: semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, micro-structure processing, and process modeling.

EECS 528 - M-Elec Proc Tech
Schedule Listing
001 (LEC)
P
10699
Open
26
 
-
TuTh 9:30AM - 11:00AM
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