MECHENG 553 - Microelectromechanical Systems
Section: 001
Term: FA 2018
Subject: Mechanical Engineering (MECHENG)
Department: CoE Mechanical Engineering
Credits:
3 (Non-LSA credit).
Requirements & Distribution:
BS
Waitlist Capacity:
99
Advisory Prerequisites:
Senior/Grad Standing.
BS:
This course counts toward the 60 credits of math/science required for a Bachelor of Science degree.
Repeatability:
May not be repeated for credit.
Primary Instructor:

Basic integrated circuit (IC) manufacturing processes; electronics devices fundamentals; microelectromechanical systems fabrications including surface micromachining, bulk micromachining, LIGA and others. Introduction to micro-actuators and microsensors such as micromotors, grippers, accelerometers and pressure sensors. Mechanical and electrical issues in micromachining. IC CAD tools to design microelectromechanical structures using MCNC MUMPs service. Design projects.

MECHENG 553 - Microelectromechanical Systems
Schedule Listing
001 (LEC)
P
24881
Closed
0
 
3
TuTh 4:00PM - 5:30PM
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